Plasma Processes

Plasma processes play a very important role for a number of microfabrication techniques such as reactive ion etching or sputter deposition. At CMNT we operate a broad range of tools that rely on plasma processes such as inductively coupled plasma reactive ion etching, metal and dielectric sputter deposition, oxygen plasma ashing as well as remote […]

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Microsystems

Apart from microfabrication, CMNT also offers a broad range of different tools for chip packaging such as reflow ovens, thick and thin wire bonders as well as flip-chip bonders. Packaging is particularly important technique to assemble e.g. micro- and nanoelectromechanical sensor chips and their periphery into full microsystems.

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CMNT

The Central Laboratory for Micro- and Nanotechnology (CMNT) is a shared user facility and the central clean-room of RWTH Aachen University. Currently, CMNT is distributed over several labs in multiple institutes. The main CMNT lab (CMNT – Module 1) provides a clean-room of 509 m2 with a maximum class 5 of particulate air cleanliness (as […]

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Working in the Cleanroom

The Central Laboratory for Micro- and Nanotechnolgy (CMNT) provides a state-of-the-art microfabrication tool set that allows a great variety of different processes ranging from optical and electron-beam lithography, dry and wet etching, physical and chemical-vapor deposition and thermal processingto exhaustive characterization methods. The clean-room is operated in a way that is strict enough to avoid […]

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Teaching in the CMNT

Laboratory courses on e.g. CMOS device fabrication within the bachelor and master programs on physics and electrical engineering are carried out in the Central Laboratory for Micro- and Nanotechnology. After sufficient training, students can fabricate and characterize their own samples using state-of-the-art research equipment.

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