Stylus Profiler

Stylus Profiler Tencor, P-10 Usage Modus Operandi:User-Mode Contamination category:C Sample-size:100 mm, 150 mm, 200mm Wafer FOM-Name and Location FOM-Name:- Profiler Tencor P-10 Location:ZMNT, Room 007 Resources Tool manager: Jochen Heiss Instruction video: Not available Tool description: A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety […]

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SEM 3 (JEOL)

Scanning Electron Microscope JEOL, JSM-6700F Usage Modus Operandi:User-mode Contamination category:C Sample-size:Pieces FOM-Name and Location FOM-Name:- IHT – SEM (JEOL) Location:WSH, Room 24B102 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: JEOL, JSM 6700F Cold field-emitter SEM with load-lock

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SEM 1 (Zeiss Sigma)

Scanning Electron Microscope Zeiss, Sigma Usage Modus Operandi:User-mode Contamination category: A, B Sample-size:Pieces … 4″ FOM-Name and Location FOM-Name:- IHT – SEM (Zeiss Sigma) Location:WSH, Room 24B107 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Zeiss, Sigma Thermal field-emitter SEM

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micro-Raman Spectrometer

µ-Raman Spectrometer Renishaw, inVia Usage Modus Operandi:User-mode Contamination category: A, B, C Sample-size:Pieces FOM-Name and Location FOM-Name:- IHT – mu-Raman Spectrometer Location:WSH, Room 24B120 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: µ-Raman spectrometer

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Sheet Resistance Measurements (Sherescan)

Sheet Resistance Measurement System SunLab, Sherescan Usage Modus Operandi:User-mode Contamination category: B, C Sample-size:Pieces … 6″ square FOM-Name and Location FOM-Name:- IHT – Sheet Resistance Measurements (Sherescan) Location:WSH, Room 24B116 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: 4-probe sheet resistance measurements Automatic scans

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Hall Measurements

Hall Measurement System Ecopia, HMS 5000 Usage Modus Operandi:User-mode Contamination category: C Sample-size:Pieces FOM-Name and Location FOM-Name:- IHT – Hall Measurements Location:WSH, Room 24B116 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Hall measurement set-up with permanent magents (0.57 T) Van der Pauw measurements Temperature range: 77…350 K

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Low- and High-Temp Vac Probe Station

Low- and High-Temperature Vacuum Probe Station with Heatable Transfer Box Kammrath & Weiss, Cryo-Stage and Heating Module Usage Modus Operandi:User-mode Contamination category: C Sample-size:Pieces FOM-Name and Location FOM-Name:- IHT – Low- and High-Temp I-V  Measurements Location:WSH, Room 24B116 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Vacuum probe station with 5 in-situ […]

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SEM 2 (Zeiss Sigma)

Scanning Electron Microscope Zeiss, Sigma Usage Modus Operandi: … Contamination category: A, B, C Sample-size: Pieces … 4″ FOM-Name and Location FOM-Name:SEM (GaN-BET) Location:CMNT, Room 004 Resources Tool manager: Frank Jessen Instruction video: Open video Tool description: Zeiss, Sigma

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ECV

Electrochemical Capacitance-Voltage Measurement System WEP, CVP21 Usage Modus Operandi:User-mode Contamination category: A, B, C Sample-size:Pieces FOM-Name and Location FOM-Name:- IHT – Electrochemical C-V Measurements Location:WSH, Room 24B121 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: WEP, CVP21

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IQE Measurements (PV Tools)

Internal Quantum Efficiency Measurement System PV Tools, IQE-SCAN Usage Modus Operandi:User-mode Contamination category: A, B, C Sample-size:Pieces and 6″ solar cells FOM-Name and Location FOM-Name:- IHT – IQE Measurements Location:WSH, Room 24B116 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: PV Tools, IQE-SCAN

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