Wet Bench for Resist Coating

Wet Bench for Resist Coating Arias Usage Modus Operandi:User-Mode Contamination category:C Sample-size:100 mm, 150 mm Wafer FOM-Name and Location FOM-Name:- Litho-Bench 1 Location:ZMNT, Room 009 Resources Tool manager: Jochen Heiss Instruction video: Not available Tool description: Hotplate small, medium, big (Gestigkeit), Spin Coater RC8 (SÜSS MicroTec, RC8 )

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Wet Bench for Standard Cleaning (RCA)

Wet Bench for Standard Cleaning (RCA) Arias Usage Modus Operandi:Service-Mode Contamination category:A Sample-size:dedicated holder for 2×2 cm2 and 3×3 cm2; 4″, 5″, 6″, 8″ wafers FOM-Name and Location FOM-Name:- AMO – Wet Bench RCA Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: Single wafer and batch; cleaning processes

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Wet Bench for Lithography Processes

Wet Bench for Lithography Processes Arias Usage Modus Operandi:Service-Mode Contamination category:B Sample-size:wide range of sample and wafer sizes up to 8″ FOM-Name and Location FOM-Name:- AMO – Wet Bench Lithography Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: Single wafer, batch and samples; cleaning and resist processes

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Wet Bench for Imprint Processes

Wet Bench for Imprint Processes Arias Usage Modus Operandi:Service-Mode Contamination category:B and C (dedicated halves) Sample-size:pieces – 8″ wafers FOM-Name and Location FOM-Name:- AMO – Went Bench Imprint Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: wet bench right (class C), carrier left (class B)

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Wet Benches Solvents, Resists, Developers

Wet Benches for Solvents, Resists and Developers Usage Modus Operandi:User-mode Contamination category: C Sample-size:Pieces … 4″ FOM-Name and Location FOM-Name: – Physik – Wet Benches Location: Physikzentrum, Room 28A313 Resources Tool manager:Natalie Bruger Instruction video:Open video Tool description:Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.

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Wet Bench Fume Hood

Wet Bench Fume Hood Arias Usage Modus Operandi:User-mode Contamination category: A,B (right side),C (left side) if appropriate labware and beakers are used Sample-size:Pieces … 6″ wafers FOM-Name and Location FOM-Name:Wet Bench Fume Hood Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: 

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Single Wafer Cleaning

Single-Wafer Cleaning System acp, Corwet 200M Usage Modus Operandi:User-mode Contamination category: A, B Sample-size:4″ wafers only FOM-Name and Location FOM-Name:Single-Wafer Cleaner Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Tool description: 

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