CMP

Chemical-Mechanical Polisher STRASBAUGH, 6EC Usage Modus Operandi:User-mode Contamination category: A, B (C with dedicated polishing pads) Sample-size:4″ FOM-Name and Location FOM-Name:Chemical-Mechanical Polisher Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: STRASBAUGH, 6EC

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Single Wafer Cleaning

Single-Wafer Cleaning System acp, Corwet 200M Usage Modus Operandi:User-mode Contamination category: A, B Sample-size:4″ wafers only FOM-Name and Location FOM-Name:Single-Wafer Cleaner Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Tool description: 

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