Wet Oxidation Furnace

Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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Dry Oxidation Furnace

Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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RTP (RTP 150)

UniTemp, RTP 150 Modus Operandi:User-modeContamination category: CSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (RTP 150)Location:WSH, Room 24B309 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Inert gas (Ar) annealing, Forming gas annealing, Oxidation (O2)

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RTP (AS-One 150)

Annealsys, AS-One 150 Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (AS-One 150)Location:WSH, Room 24B101 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Cold-wall RTP with stainless steel chamber, high vacuum, annealing in pure hydrogen possible, process gases: Ar, NH3, O2, H2

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