Rapid Thermal Processing Furnace

Rapid Thermal Processing Furnace Jipelec, JetFirst Usage Modus Operandi:Service-Mode Contamination category:C Sample-size:up to 6″ wafers; 6″ dummy wafer for samples FOM-Name and Location FOM-Name:- AMO – RTP Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: 6″ Rapid Thermal Annealing system up to 1100°C; process gases H2, N2, Ar

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Wet Oxidation Furnace

Dry Oxidation Furnace Centrotherm Usage Modus Operandi:Service-Mode Contamination category:A Sample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name and Location FOM-Name:- AMO – Dry Oxidation Furnace Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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Dry Oxidation Furnace

Dry Oxidation Furnace Centrotherm Usage Modus Operandi:Service-Mode Contamination category:A Sample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name and Location FOM-Name:- AMO – Dry Oxidation Furnace Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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Annealer (Self-built)

Annealer Self-built Usage Modus Operandi:User-mode Contamination category: C Sample-size:Pieces FOM-Name and Location FOM-Name:- Physik – Annealer Location:Physikzentrum, Room 28A313 Resources Tool manager:Natalie Bruger Instruction video:Open video Tool description: Self-built annealer

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RTP (RTP 150)

Rapid Thermal Processing Furnace UniTemp, RTP 150 Usage Modus Operandi:User-mode Contamination category: C Sample-size:Pieces … 6″ wafers FOM-Name and Location FOM-Name:– IHT – RTP (RTP 150) Location:WSH, Room 24B309 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Inert gas (Ar) annealing, Forming gas annealing, Oxidation (O2)

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RTP (AS-One 150)

Rapid Thermal Processing Furnace Annealsys, AS-One 150 Usage Modus Operandi:User-mode Contamination category: A, B Sample-size:Pieces … 6″ wafers FOM-Name and Location FOM-Name:– IHT – RTP (AS-One 150) Location:WSH, Room 24B101 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Cold-wall RTP with stainless steel chamber, high vacuum, annealing in pure hydrogen possible, process […]

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