MA_BA6

SÜSS MicroTec, MA/BA6 Modus Operandi:User-modeContamination category: A,B,C if appropriate chuck and masks are usedSample-size:Pieces … 6″ wafer FOM-Name:Optical Lithography (MABA6)Location:CMNT, Room 009 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Top- and back-side alignment

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