Wet Oxidation Furnace

Dry Oxidation Furnace Centrotherm Usage Modus Operandi:Service-Mode Contamination category:A Sample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name and Location FOM-Name:- AMO – Dry Oxidation Furnace Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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Dry Oxidation Furnace

Dry Oxidation Furnace Centrotherm Usage Modus Operandi:Service-Mode Contamination category:A Sample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name and Location FOM-Name:- AMO – Dry Oxidation Furnace Location:AMO Resources Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm

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