Sputtering System

Sputtering System Nordiko, NS 2550 Duisburg Usage Modus Operandi:Service-Mode Contamination category:C Sample-size:100 mm, 150 mm Wafer FOM-Name and Location FOM-Name:- Nordiko (Duisburg) Location:ZMNT, Room 007 Resources Tool manager: Jochen Heiss Instruction video: Not available Tool description:Targets: Ti, Pl, Iridium, on demand

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Sputtering System

Sputtering System Nordiko, NS 2550 Berlin Usage Modus Operandi:Service-Mode Contamination category:C Sample-size:100 mm, 150 mm Wafer FOM-Name and Location FOM-Name:- Nordiko (Berlin) Location:ZMNT, Room 007 Resources Tool manager: Jochen Heiss Instruction video: Not available Tool description: Targets: Ti, Au, changing, on demand

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