Plasma processes play a very important role for a number of microfabrication techniques such as reactive ion etching or sputter deposition. At CMNT we operate a broad range of tools that rely on plasma processes such as inductively coupled plasma reactive ion etching, metal and dielectric sputter deposition, oxygen plasma ashing as well as remote […]
Apart from microfabrication, CMNT also offers a broad range of different tools for chip packaging such as reflow ovens, thick and thin wire bonders as well as flip-chip bonders. Packaging is particularly important technique to assemble e.g. micro- and nanoelectromechanical sensor chips and their periphery into full microsystems.
The Central Laboratory for Micro- and Nanotechnology (CMNT) is a shared user facility and the central clean-room of RWTH Aachen University. Currently, CMNT is distributed over several labs in multiple institutes. The main CMNT lab (CMNT – Module 1) provides a clean-room of 509 m2 with a maximum class 5 of particulate air cleanliness (as […]
The Central Laboratory for Micro- and Nanotechnolgy (CMNT) provides a state-of-the-art microfabrication tool set that allows a great variety of different processes ranging from optical and electron-beam lithography, dry and wet etching, physical and chemical-vapor deposition and thermal processingto exhaustive characterization methods. The clean-room is operated in a way that is strict enough to avoid […]
Laboratory courses on e.g. CMOS device fabrication within the bachelor and master programs on physics and electrical engineering are carried out in the Central Laboratory for Micro- and Nanotechnology. After sufficient training, students can fabricate and characterize their own samples using state-of-the-art research equipment.