SEM 3 (JEOL)

JEOL, JSM-6700F Modus Operandi:User-modeContamination category:CSample-size:Pieces FOM-Name:- IHT – SEM (JEOL)Location:WSH, Room 24B102 Tool manager: Birger Berghoff Instruction video: Open video Tool description: JEOL, JSM 6700F Cold field-emitter SEM with load-lock

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SEM 1 (Zeiss Sigma)

Zeiss, Sigma Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 4″ FOM-Name:- IHT – SEM (Zeiss Sigma)Location:WSH, Room 24B107 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Zeiss, Sigma Thermal field-emitter SEM

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RIE (RIE-51)

MRC, RIE-51 Modus Operandi:User-modeContamination category: A, B, CSample-size:Pieces … 4″ FOM-Name:RIE 51Location:WSH, Room 24B131 Tool manager: Birger Berghoff Instruction video: Open video Tool description: SF6, CHF3, O2 and BCl3 based etching

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ICP-RIE (Fluorian)

SENTECH, ICP-RIE SI 500 Modus Operandi: …Contamination category: CSample-size: Pieces … 4″ FOM-Name:ICP-RIE (Fluorian)Location:CMNT, Room 004 Tool manager:Jan GruisInstruction video:Open videoTool description:SENTECH ICP-RIE SI500Flourine-based process gases

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Dicing Saw (DISCO DAD321)

DISCO, DAD321 Modus Operandi:Service-modeContamination category: A, BSample-size:Pieces … 4″ FOM-Name: – IHT – Dicing Saw Location: WSH, Room 24B108 Tool manager: Birger Berghoff Instruction video: Open video Tool description: DISCO, DAD321 Dicing saw for wafers up to 150 mm Materials: silicon, quartz, sapphire

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Hall Measurements

Ecopia, HMS 5000 Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- IHT – Hall MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Hall measurement set-up with permanent magents (0.57 T) Van der Pauw measurements Temperature range: 77…350 K

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Low- and High-Temp Vac Probe Station

Kammrath & Weiss, Cryo-Stage and Heating Module Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- IHT – Low- and High-Temp I-V  MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Vacuum probe station with 5 in-situ maneuverable tips Temperatures range with evaporation cryostat: 8…320 K Transfer box can be opened in-situ, equipped with hot-plate that […]

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CMP

STRASBAUGH, 6EC Modus Operandi:User-modeContamination category: A, B (C with dedicated polishing pads)Sample-size:4″ FOM-Name:Chemical-Mechanical PolisherLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: STRASBAUGH, 6EC

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