Spectroscopic Ellipsometer
Accurion, nanofilm_ep4se
Usage
- Modus Operandi:
User-mode - Contamination category: A,B,C if appropriate carrier wafers are used
- Sample-size:
Pieces ... 4″ wafer
FOM-Name and Location
- FOM-Name:
Ellipsometer - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description:
Mapping is possible (100 mm x 100 mm),
lateral resolution: 1 μm,
spectral range: 360…950 nm
Standard Operation Procedure EP4v2.3,
Mapping EP4v1.1,
Short Manual