Wet Bench Resist and HMDS Coating

Arias

• Modus Operandi:
  User-mode
• Contamination category: A, B, C if appropriate handle wafer and chucks are used
• Sample-size:
  Pieces ... 6″ wafer

• FOM-Name:
  Wet Bench Resist Coating
• Location:
  CMNT, Room 001

• Tool manager:
  Birger Berghoff
• Instruction video:
  Open video
• Tool description: