Dicing Saw (DISCO DAD321)

Joachim Knoch Available Processing Tools, Dicing

Dicing Saw

DISCO, DAD321

Usage

  • Modus Operandi:
    Service-mode
  • Contamination category: A, B
  • Sample-size:
    Pieces ... 4″
Dicing Saw - Silicon

FOM-Name and Location

  • FOM-Name:
    - IHT - Dicing Saw
  • Location:
    WSH, Room 24B108

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    DISCO, DAD321
    Dicing saw for wafers up to 150 mm
    Materials: silicon, quartz, sapphire