Electron-Beam Evaporation System

Leybold, A700QE

• Modus Operandi:
  Service-Mode
• Contamination category:
  C
• Sample-size:
  100 mm, 150 mm Wafer

• FOM-Name:
  - Box Coater Leybold A700QE (Electron-Beam)
• Location:
  ZMNT, Room 007

• Tool manager:
  Jochen Heiss
• Instruction video:
  Not available
• Tool description:
  Materials: Au, Cr, Ti, Cu, Al, on demand