Metallization

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  • Electron-Beam Evaporation System

    Leybold, A700QE

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      100 mm, 150 mm Wafer

    FOM-Name and Location

    • FOM-Name:
      - Box Coater Leybold A700QE (Electron-Beam)
    • Location:
      ZMNT, Room 007

    Resources

    • Tool manager:
      Jochen Heiss
    • Instruction video:
      Not available
    • Tool description:
      Materials: Au, Cr, Ti, Cu, Al, on demand
    Continue reading →
  • Sputtering System

    Nordiko, NS 2550 Duisburg

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      100 mm, 150 mm Wafer

    FOM-Name and Location

    • FOM-Name:
      - Nordiko (Duisburg)
    • Location:
      ZMNT, Room 007

    Resources

    • Tool manager:
      Jochen Heiss
    • Instruction video:
      Not available
    • Tool description:
      Targets: Ti, Pl, Iridium, on demand
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  • Sputtering System

    Nordiko, NS 2550 Berlin

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      100 mm, 150 mm Wafer

    FOM-Name and Location

    • FOM-Name:
      - Nordiko (Berlin)
    • Location:
      ZMNT, Room 007

    Resources

    • Tool manager:
      Jochen Heiss
    • Instruction video:
      Not available
    • Tool description:
      Targets: Ti, Au, changing, on demand
    Continue reading →
  • Atomic Layer Deposition Tool

    Oxford Instruments, FlexAL

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      up to 8" wafers; 8" dummy wafer for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - ALD
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      Materials: AlN, Al2O3, TaN, TiN; process gases: N2, H2, O2, SF6, Ar, NH3, H2O; Wafer stage temperature up to 400°C
    Continue reading →
  • Electron-Beam and Thermal Evaporation System

    Pfeiffer Vacuume, Classic 580

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      4"-, 5"- and 6"-wafers; sample size up to 6"

    FOM-Name and Location

    • FOM-Name:
      - AMO - Evaporator
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      6″ e-beam and resistive evaporator; Materials: Al, Cr, SiO2, Ti, Ta2O5, etc.; process gases: N2, O2
    Continue reading →
  • Electron-Beam Evaporation, Thermal Evaporation and Sputtering System

    CREAVAC

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces ... 4″
    E-Beam Evaporator

    FOM-Name and Location

    • FOM-Name:
      E-Beam and Thermal Evaporator
    • Location:
      CMNT, Room 002

    Resources

    • Tool manager:
      Natalie Bruger
    • Instruction video:
      Open video
    • Tool description:
      7 x 7 cm3 e-beam evaporator crucibles (8 keV),
      2 thermal evaporators (2 kW),
      1 DC sputter source,
      Ar milling,
      base pressure: 5 x 10-8 mbar,
      load-lock,
      fully rotatable, tiltable (+75°), heatable 200 °C, water-cooled,
      variable working distance: 20...70 cm
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  • Cluster Tool for Atomic Layer Deposition and Inductively Coupled Plasma Chemical Vapor Deposition

    Oxford Instruments, PlasmalabSystem 100

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: B
    • Sample-size:
      Pieces ... 6″ wafers,
      8" wafer possible with small modifications
    Oxford Clustertool, ALD – ICP-PECVD

    FOM-Name and Location

    • FOM-Name:
      – IHT – Cluster-Tool (ALD and ICP-CVD)
    • Location:
      WSH, Room 24B101

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Oxford Instruments, PlasmalabSystem 100
    Continue reading →

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