All Characterization Tools

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  • Stylus Profiler

    Tencor, P-10

    Usage

    • Modus Operandi:
      User-Mode
    • Contamination category:
      C
    • Sample-size:
      100 mm, 150 mm, 200mm Wafer

    FOM-Name and Location

    • FOM-Name:
      - Profiler Tencor P-10
    • Location:
      ZMNT, Room 007

    Resources

    • Tool manager:
      Jochen Heiss
    • Instruction video:
      Not available
    • Tool description:
      A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.
    Continue reading →
  • Scanning Electron Microscope

    JEOL, JSM-6700F

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category:
      C
    • Sample-size:
      Pieces
    JEOL SEM

    FOM-Name and Location

    • FOM-Name:
      - IHT - SEM (JEOL)
    • Location:
      WSH, Room 24B102

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      JEOL, JSM 6700F
      Cold field-emitter SEM with load-lock
    Continue reading →
  • Scanning Electron Microscope

    Zeiss, Sigma

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B
    • Sample-size:
      Pieces ... 4″
    Zeiss Sigma SEM 2

    FOM-Name and Location

    • FOM-Name:
      - IHT - SEM (Zeiss Sigma)
    • Location:
      WSH, Room 24B107

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Zeiss, Sigma
      Thermal field-emitter SEM
    Continue reading →
  • µ-Raman Spectrometer

    Renishaw, inVia

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B, C
    • Sample-size:
      Pieces
    micro-Raman Spectrometer

    FOM-Name and Location

    • FOM-Name:
      - IHT - mu-Raman Spectrometer
    • Location:
      WSH, Room 24B120

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      µ-Raman spectrometer
    Continue reading →
  • Sheet Resistance Measurement System

    SunLab, Sherescan

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: B, C
    • Sample-size:
      Pieces ... 6″ square
    Resistivity Measurements

    FOM-Name and Location

    • FOM-Name:
      - IHT - Sheet Resistance Measurements (Sherescan)
    • Location:
      WSH, Room 24B116

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      4-probe sheet resistance measurements
      Automatic scans
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  • Hall Measurement System

    Ecopia, HMS 5000

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces
    Hall Measurements (77K-300K)

    FOM-Name and Location

    • FOM-Name:
      - IHT - Hall Measurements
    • Location:
      WSH, Room 24B116

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Hall measurement set-up with permanent magents (0.57 T)
      Van der Pauw measurements
      Temperature range: 77...350 K
    Continue reading →
  • Low- and High-Temperature Vacuum Probe Station with Heatable Transfer Box

    Kammrath & Weiss, Cryo-Stage and Heating Module

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces
    Low-Temperature Probe Station with Transfer Box

    FOM-Name and Location

    • FOM-Name:
      - IHT - Low- and High-Temp I-V  Measurements
    • Location:
      WSH, Room 24B116

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Vacuum probe station with 5 in-situ maneuverable tips
      Temperatures range with evaporation cryostat: 8...320 K
      Transfer box can be opened in-situ, equipped with hot-plate that allows temperatures up to 800 °C
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  • Scanning Electron Microscope

    Zeiss, Sigma

    Usage

    • Modus Operandi:
      ...
    • Contamination category: A, B, C
    • Sample-size:
      Pieces ... 4″
    Zeiss Sigma SEM

    FOM-Name and Location

    • FOM-Name:
      SEM (GaN-BET)
    • Location:
      CMNT, Room 004

    Resources

    • Tool manager:
      Frank Jessen
    • Instruction video:
      Open video
    • Tool description:
      Zeiss, Sigma
    Continue reading →
  • Electrochemical Capacitance-Voltage Measurement System

    WEP, CVP21

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B, C
    • Sample-size:
      Pieces
    Electrochemical Capacitance Voltage Measurements

    FOM-Name and Location

    • FOM-Name:
      - IHT - Electrochemical C-V Measurements
    • Location:
      WSH, Room 24B121

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      WEP, CVP21
    Continue reading →
  • Internal Quantum Efficiency Measurement System

    PV Tools, IQE-SCAN

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B, C
    • Sample-size:
      Pieces and 6″ solar cells
    PVTools IQE Measurements

    FOM-Name and Location

    • FOM-Name:
      - IHT - IQE Measurements
    • Location:
      WSH, Room 24B116

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      PV Tools, IQE-SCAN
    Continue reading →

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