Dicing

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  • Dicing Saw

    DISCO, DAD321

    Usage

    • Modus Operandi:
      Service-mode
    • Contamination category: A, B
    • Sample-size:
      Pieces ... 4″
    Dicing Saw - Silicon

    FOM-Name and Location

    • FOM-Name:
      - IHT - Dicing Saw
    • Location:
      WSH, Room 24B108

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      DISCO, DAD321
      Dicing saw for wafers up to 150 mm
      Materials: silicon, quartz, sapphire
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