Polishing

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  • Chemical-Mechanical Polisher

    STRASBAUGH, 6EC

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B (C with dedicated polishing pads)
    • Sample-size:
      4″
    Chemical Mechanical Polishing

    FOM-Name and Location

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      STRASBAUGH, 6EC
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  • Single-Wafer Cleaning System

    acp, Corwet 200M

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B
    • Sample-size:
      4″ wafers only
    Single Wafer Cleaning

    FOM-Name and Location

    Resources

    Continue reading →

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