Electron-Beam Lithography

Back to overview of tools.

  • Electron-Beam Lithography System

    Vistec, EBPG 5200

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      B and C (dedicated holder)
    • Sample-size:
      from samples of 10×10 mm² up to 8" wafers

    FOM-Name and Location

    • FOM-Name:
      - AMO - E-Beam Litho (Vistec EBPG 5200)
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      E-Beam lithography tool; 50/100 kV; sub 10 nm resolution
    Continue reading →
  • Electron-Beam Lithography System

    RAITH, eLINE

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: B, C
    • Sample-size:
      Pieces ... 4″
    E-Beam Lithography RAITH E-Line

    FOM-Name and Location

    • FOM-Name:
      - Physik - E-Beam Litho (Raith eLINE)
    • Location:
      Physikzentrum, Room 28A315

    Resources

    • Tool manager:
      Lars Schreiber
    • Instruction video:
      Open video
    • Tool description:
      Raith, eLINE
    Continue reading →
  • Wet Benches for Solvents, Resists and Developers

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces ... 4″
    Physik Wetbenches

    FOM-Name and Location

    • FOM-Name:
      - Physik - Wet Benches
    • Location:
      Physikzentrum, Room 28A313

    Resources

    • Tool manager:
      Natalie Bruger
    • Instruction video:
      Open video
    • Tool description:
      Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.
    Continue reading →
  • Electron Beam Lithography System

    Raith,  RAITH150 Two

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A,B,C if appropriate chucks are used
    • Sample-size:
      Pieces ... 6″ wafers
    Electron Beam Lithography, RAITH 150/Two

    FOM-Name and Location

    • FOM-Name:
      – IHT – E-Beam Litho (RAITH150 Two)
    • Location:
      WSH, Room 24B102

    Resources

    Continue reading →

Back to overview of tools.