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Electron-Beam Evaporation System
Leybold, A700QE
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
100 mm, 150 mm Wafer
FOM-Name and Location
- FOM-Name:
- Box Coater Leybold A700QE (Electron-Beam) - Location:
ZMNT, Room 007
Resources
- Tool manager:
Jochen Heiss - Instruction video:
Not available - Tool description:
Materials: Au, Cr, Ti, Cu, Al, on demand
- Modus Operandi:
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Sputtering System
Nordiko, NS 2550 Duisburg
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
100 mm, 150 mm Wafer
FOM-Name and Location
- FOM-Name:
- Nordiko (Duisburg) - Location:
ZMNT, Room 007
Resources
- Tool manager:
Jochen Heiss - Instruction video:
Not available - Tool description:
Targets: Ti, Pl, Iridium, on demand
- Modus Operandi:
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Sputtering System
Nordiko, NS 2550 Berlin
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
100 mm, 150 mm Wafer
FOM-Name and Location
- FOM-Name:
- Nordiko (Berlin) - Location:
ZMNT, Room 007
Resources
- Tool manager:
Jochen Heiss - Instruction video:
Not available - Tool description:
Targets: Ti, Au, changing, on demand
- Modus Operandi:
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Electron-Beam and Thermal Evaporation System
Pfeiffer Vacuume, Classic 580
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
4"-, 5"- and 6"-wafers; sample size up to 6"
FOM-Name and Location
- FOM-Name:
- AMO - Evaporator - Location:
AMO
Resources
- Tool manager:
AMO - Instruction video:
Not available - Tool description:
6″ e-beam and resistive evaporator; Materials: Al, Cr, SiO2, Ti, Ta2O5, etc.; process gases: N2, O2
- Modus Operandi:
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Electron-Beam Evaporation, Thermal Evaporation and Sputtering System
CREAVAC
Usage
- Modus Operandi:
User-mode - Contamination category: C
- Sample-size:
Pieces ... 4″
FOM-Name and Location
- FOM-Name:
E-Beam and Thermal Evaporator - Location:
CMNT, Room 002
Resources
- Tool manager:
Natalie Bruger - Instruction video:
Open video - Tool description:
7 x 7 cm3 e-beam evaporator crucibles (8 keV),
2 thermal evaporators (2 kW),
1 DC sputter source,
Ar milling,
base pressure: 5 x 10-8 mbar,
load-lock,
fully rotatable, tiltable (+75°), heatable 200 °C, water-cooled,
variable working distance: 20...70 cm
- Modus Operandi:
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