Oxidation

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  • Dry Oxidation Furnace

    Centrotherm

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      A
    • Sample-size:
      up to 200x6" or up to 50x8" wafers per run; 15x15 cm tray for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - Dry Oxidation Furnace
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
    Continue reading →
  • Dry Oxidation Furnace

    Centrotherm

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      A
    • Sample-size:
      up to 200x6" or up to 50x8" wafers per run; 15x15 cm tray for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - Dry Oxidation Furnace
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
    Continue reading →

Back to overview of tools.