Laser Scanning Microscope

Keyence, VK-X 200 Modus Operandi:User-modeContamination category:A, B, C if appropriate handle wafer is usedSample-size:Pieces … 6″ wafers FOM-Name:3D Laser Scanning MicroscopeLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: 3D Laser Scanning Confocal Microscope, motorized x-y-z-stage, optical height/profile measurements, used to automated search of 2D material flakes, transfer aparatus for 2D […]

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Spectroscopic Ellipsometer

Accurion, nanofilm_ep4se Modus Operandi:User-modeContamination category: A,B,C if appropriate carrier wafers are usedSample-size:Pieces …  4″ wafer FOM-Name:EllipsometerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Mapping is possible (100 mm x 100 mm), lateral resolution: 1 μm, spectral range: 360…950 nm Standard Operation Procedure EP4v2.3, Mapping EP4v1.1, Short Manual

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