Zeiss, Sigma Modus Operandi: … Contamination category: A, B, C Sample-size: Pieces … 4″ FOM-Name:SEM (GaN-BET)Location:CMNT, Room 004 Tool manager: Frank Jessen Instruction video: Open video Tool description: Zeiss, Sigma
Month: June 2016
Mask Aligner (MJB3)
SÜSS MicroTec, MJB3 Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 3″ FOM-Name:- Physik – Photolithography System (MJB3)Location:Physikzentrum, Room 28A313 Tool manager: Arne Hollmann Instruction video: Open video Tool description: SÜSS MicroTec, MJB3
Plasma Asher (PP35)
Alpha Plasma, PP35 Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name:- Physik – Plasma AsherLocation:Physikzentrum, Room 28A313 Tool manager: Lars Schreiber Instruction video: Open video Tool description: Alpha Plasma, PP35
E-Beam Lithography (eLINE)
RAITH, eLINE Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 4″ FOM-Name:- Physik – E-Beam Litho (Raith eLINE)Location:Physikzentrum, Room 28A315 Tool manager: Lars Schreiber Instruction video: Open video Tool description: Raith, eLINE