RIE (RIE-51)

MRC, RIE-51 Modus Operandi:User-modeContamination category: A, B, CSample-size:Pieces … 4″ FOM-Name:RIE 51Location:WSH, Room 24B131 Tool manager: Birger Berghoff Instruction video: Open video Tool description: SF6, CHF3, O2 and BCl3 based etching

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Dicing Saw (DISCO DAD321)

DISCO, DAD321 Modus Operandi:Service-modeContamination category: A, BSample-size:Pieces … 4″ FOM-Name: – IHT – Dicing Saw Location: WSH, Room 24B108 Tool manager: Birger Berghoff Instruction video: Open video Tool description: DISCO, DAD321 Dicing saw for wafers up to 150 mm Materials: silicon, quartz, sapphire

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CMP

STRASBAUGH, 6EC Modus Operandi:User-modeContamination category: A, B (C with dedicated polishing pads)Sample-size:4″ FOM-Name:Chemical-Mechanical PolisherLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: STRASBAUGH, 6EC

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