Oxford Instruments, PlasmalabSystem 100 Modus Operandi:User-modeContamination category: BSample-size:Pieces … 6″ wafers,8″ wafer possible with small modifications FOM-Name:– IHT – Cluster-Tool (ALD and ICP-CVD)Location:WSH, Room 24B101 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Oxford Instruments, PlasmalabSystem 100
Category: Available Processing Tools
RTP (RTP 150)
UniTemp, RTP 150 Modus Operandi:User-modeContamination category: CSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (RTP 150)Location:WSH, Room 24B309 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Inert gas (Ar) annealing, Forming gas annealing, Oxidation (O2)
RTP (AS-One 150)
Annealsys, AS-One 150 Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (AS-One 150)Location:WSH, Room 24B101 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Cold-wall RTP with stainless steel chamber, high vacuum, annealing in pure hydrogen possible, process gases: Ar, NH3, O2, H2
Plasma Asher/SF6 Plasma Etcher
Oxford Instruments, Plasmalab PRS 90 Modus Operandi:User-modeContamination category:B,C if appriate handle wafers are usedSample-size:Pieces … 6″ wafers FOM-Name:– IHT – Plasma AsherLocation:WSH, Room 24B132 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Electron-Beam Lithography (RAITH150 Two)
Raith, RAITH150 Two Modus Operandi:User-modeContamination category: A,B,C if appropriate chucks are usedSample-size:Pieces … 6″ wafers FOM-Name:– IHT – E-Beam Litho (RAITH150 Two)Location:WSH, Room 24B102 Tool manager: Birger Berghoff Instruction video: Tool description:
Wet Bench Solvents and Resist Development
Arias Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:Wet Bench Solvents and Resist DevelopmentLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Wet Bench Fume Hood
Arias Modus Operandi:User-modeContamination category: A,B (right side),C (left side) if appropriate labware and beakers are usedSample-size:Pieces … 6″ wafers FOM-Name:Wet Bench Fume HoodLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Single Wafer Cleaning
acp, Corwet 200M Modus Operandi:User-modeContamination category: A, BSample-size:4″ wafers only FOM-Name:Single-Wafer CleanerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Tool description:
Wet Bench Standard Clean (RCA)
Arias Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 8″ wafers FOM-Name:Wet Bench RCALocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Wet Bench Resist and HMDS Coating
Arias Modus Operandi:User-modeContamination category: A, B, C if appropriate handle wafer and chucks are usedSample-size:Pieces … 6″ wafer FOM-Name:Wet Bench Resist CoatingLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: