Working in the Cleanroom

The Central Laboratory for Micro- and Nanotechnolgy (ZMNT) provides a state-of-the-art microfabrication tool set that allows a great variety of different processes ranging from optical and electron-beam lithography, dry and wet etching, physical and chemical-vapor deposition and thermal processingto exhaustive characterization methods. The clean-room is operated in a way that is strict enough to avoid […]

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Teaching at ZMNT

Laboratory courses on e.g. CMOS device fabrication within the bachelor and master programs on physics and electrical engineering are carried out in the Central Laboratory for Micro- and Nanotechnology. After sufficient training, students can fabricate and characterize their own samples using state-of-the-art research equipment.

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