Wet Chemical Processing Back to overview of tools. Wet Bench for Resist and HMDS Coating Arias Usage Modus Operandi:User-mode Contamination category: A, B, C if appropriate handle wafer and chucks are used Sample-size:Pieces ... 6″ wafer FOM-Name and Location FOM-Name:Wet Bench Resist Coating Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Open video Tool description: Continue reading →HF Vapor Phase Etcher Idonus Sarl, VPE-150 Usage Modus Operandi:User-mode Contamination category:A, B Sample-size:Pieces ... 4″ FOM-Name and Location FOM-Name:HF Vapor Phase Etcher Location:CMNT, Room 001 Resources Tool manager: Birger Berghoff Instruction video: Tool description: Continue reading →<<12 Back to overview of tools.
