Wet Chemical Processing

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  • Wet Bench for Resist and HMDS Coating

    Arias

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B, C if appropriate handle wafer and chucks are used
    • Sample-size:
      Pieces ... 6″ wafer
    Resist Coating including HMDS

    FOM-Name and Location

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
    Continue reading →

  • HF Vapor Phase Etcher

    Idonus Sarl, VPE-150

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category:
      A, B
    • Sample-size:
      Pieces ... 4″
    Idonus Vapor HF

    FOM-Name and Location

    Resources

    Continue reading →


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